| Thin Film Analyzer (TFA-11)
Luzchem's TFA-11 instrument combines the power of interferometric measurements of dry and wet thin film thickness, with a versatile, cost effective dissolution rate monitor. Its multi-wavelength design with a 3648 diode detector gives it the best spectral resolution in the market. Among the types of samples tested with the TFA-11 are resists, antireflective coatings, UV protecting films (e.g., windows and windshields), and paint coatings on various surfaces (e.g., soda cans). Luzchem will be pleased to test your coatings prior to a purchase commitment.
Luzchem's unique design (Patent approved) requires only ca. 1 mL of developer, rather than the large volumes frequently needed. Multiple measurements are possible in a single wafer; typically 4 in a 3 inch wafer and over 30 in an 8 inch wafer. Select any wavelength between 400 and 850 nm, or use the multi-wavelength analysis available in our software package. If you choose to develop your own analysis software, we provide ASCII files of all data.
For thickness-only measurements for 60 nm to tens of microns, the TFA-10 is the best cost-effective solution.
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Sample Dissolution Data
The TFA-11 can operate readily on silicon wafers, on transparent or fully reflective substrates, and its granite base provides remarkable mechanical and thermal stability. Its USB interface combines efficient data acquisition with simplicity. From about 70nm to over 25µm, the TFA-11 offers cost effective versatility, while minimizing developer usage. If you just need thickness measurements choose our unit TFA-10.
Temperature Control: TFA-11CT with full temperature control up to 180 degrees Celsius is ideal for studies of pre and post-exposure bake, crosslinking, deprotection, and solvent loss.
Luzchem thin film metrology equipment outperforms all other instruments in the market. We can do thickness analysis based on the number of peaks, or the peak shape. We can use an average refractive index or full analysis based on Cauchy numbers. With the TFA-11, kinetic acquisition is standard and included in Luzchem's software.
||Thin Film Analyzer measures only film thickness
||Upgrade for the TFA-10 to a dual capability unit TFA-11
||Thin Film Analyzer measures both film thickness and dissolution rates
||Controlled Temperature Thin Film Analyzer. Up to 180°C
||Set of 5 TFA lamps (10 Watt, 12 V) and a pair of handling gloves.
||8 Lamp photoreactor configured for top irradiation only. Ideal for polymer and lithographic applications. Recommended option: digital timer.
||Wafer baking and disc heater, for up to 8-inch wafers and temperatures up to 180°C. Includes temperature control unit.